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Viele Branchen entdecken die Mikrowellen- und Plasmatechnologie für sich - um Prozesse zu beschleunigen, zu präzisieren, energieeffizienter zu gestalten. Als weltweit führender Hersteller bewegen sich unsere Experten an der Quelle der Entwicklungen. Steigen Sie im MUEGGE Blog tiefer ein in die Materie aus der die Energielösungen der Zukunft bestehen.
Article
Semi-Conductor Microwave and Chamber-Clean
Chamber-Clean after Dielectrics Deposition – A case for isotropic microwave plasma As deposition is one of the pillars of semiconductor production, it depends on a …
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Lab-Grown-Diamonds / Microwave-Technology Lab-Grown Diamonds II: Experts Insights from a Leading Manufacturer
The alternative to conflict diamonds are lab-grown, conflict-free diamonds. Lab-grown diamonds are chemically, physically, optically and visually identical to mined diamonds. In this deep-dive about …
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Lab-Grown-Diamonds / Microwave-Technology Lab-Grown Diamonds I: Why They Outshine the Conventional Gem
They sparkle like mined gemstone, they look like “real” diamonds, and yet, there is one crucial difference: Lab-grown or man-made diamonds do not bear the …
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Automotive / MEMS / Microwave-Technology / Semi-Conductor 3D-Simulation: Slim Down Your Component Development Process
While developing thermoprocessing equipment, testing of prototypes and numerous repetitions cost plenty oftime and resources. 3D simulation capabilities allow you to speed up your prototyping …
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Automotive / Microwave-Technology Key Advantages of Microwave-Hybrid-Vulcanization
Fast, efficient, flexible. For many years already the process design in high performance vulcanization is revolutionized by microwave and microwave-hybrid-applications. The advantages are very obvious; …
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MEMS / Semi-Conductor Photoresist Removal after High Dose Implant (HDIS)
High Dose Implant Strip (HDIS) – Challengeable process in semiconductor manufacturing Photoresist strip after high dose implant strip remains one of the most demanding processes …
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MEMS / Semi-Conductor Endpoint Control for Thick Photoresist Removal
Complete removal of thick photoresist needs proper endpoint detection Applying microwave (MW) plasma to remove thick resist such as used for micro-machinery and microelectromechanical systems …
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MEMS / Semi-Conductor Quality Improvement in Micromachinery and MEMS
Removal of thick and embedded photoresist – A case for isotropic microwave plasma Microwave plasma is the perfect solution for removing thick resist such as …
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