Muegge Produkte
480
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Decapsulation-ToolArtikelnr.: MA1250D-114BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors-Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
GeneratorArtikelnr.: MG030KG-511KE
Frequency [MHz]915Output Power CW [W]30000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingLuft / WasserPulse output power max [W]-Front-Panel (HMI)-InterfaceBedienteilInterface 2EtherCATInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]1206 (47,48)Height [mm (inch)]2160 (85,04)Depth [mm (inch)]805 (31,69)Protection ClassIP54Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorNeinPower-SupplySwitch-Mode -
Generator
Artikelnr.: MG050KG-511KE
Frequency [MHz]915Output Power CW [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingLuft / WasserPulse output power max [W]-Front-Panel (HMI)-InterfaceBedienteilInterface 2EtherCATInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]1206 (47,48)Height [mm (inch)]2160 (85,04)Depth [mm (inch)]805 (31,69)Protection ClassIP54Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorNeinPower-SupplySwitch-Mode -
Generator
Artikelnr.: MG050KG-514KE
Frequency [MHz]915Output Power CW [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingLuft / WasserPulse output power max [W]-Front-Panel (HMI)-InterfaceBedienteilInterface 2EtherCATInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]1206 (47,48)Height [mm (inch)]2160 (85,04)Depth [mm (inch)]805 (31,69)Protection ClassIP54Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorNeinPower-SupplySwitch-Mode -
GeneratorArtikelnr.: MG050KI-523DL
Frequency [MHz]915Output Power CW [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingWasserPulse output power max [W]-Front-Panel (HMI)Bedienteil mit HauptschalterInterfaceModbusInterface 2BedienteilInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]800 (31,50)Height [mm (inch)]2200 (86,62)Depth [mm (inch)]1200 (47,25)Protection ClassIP54Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorNeinPower-SupplySwitch-Mode -
Generator
Artikelnr.: MG050KI-543DL
Frequency [MHz]915Output Power CW [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingWasserPulse output power max [W]-Front-Panel (HMI)Bedienteil mit HauptschalterInterfaceModbusInterface 2BedienteilInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]800 (31,50)Height [mm (inch)]2200 (86,62)Depth [mm (inch)]1200 (47,25)Protection ClassIP54Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorNeinPower-SupplySwitch-Mode -
Stripping-ToolArtikelnr.: MA1250D-118BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4N2Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-ToolArtikelnr.: MA3000D-271BB
Type of toolHigh Volume Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4O2Process gas 5-Process gas 6-Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50)
