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480
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解封装设备
Artikelnr.: MA1250D-114BB
Type of tool研发/试产设备Line Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors–Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
微波发生器
Artikelnr.: MG030KG-511KE
Frequency [MHz]915Output Power CW [W]30000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]–Line Voltage [V]480Mains voltage control circuit [V]–Line Frequency [Hz]50 / 60Cooling风冷 / 水冷Pulse output power max [W]–Front-Panel (HMI)–Interface操作单元Interface 2EtherCATInterface 3A/DInterface 4–Interface 5–Width [mm (inch)]1206 (47,48)Height [mm (inch)]2160 (85,04)Depth [mm (inch)]805 (31,69)Protection ClassIP54Output Connection TypeWR 975Output Connection波导Isolator没有Power-Supply开关式 -
微波发生器, Switch-Mode
Artikelnr.: MG050KG-511KE
Frequency [MHz]915Output Power CW [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]–Line Voltage [V]480Mains voltage control circuit [V]–Line Frequency [Hz]50 / 60Cooling风冷 / 水冷Pulse output power max [W]–Front-Panel (HMI)–Interface操作单元Interface 2EtherCATInterface 3A/DInterface 4–Interface 5–Width [mm (inch)]1206 (47,48)Height [mm (inch)]2160 (85,04)Depth [mm (inch)]805 (31,69)Protection ClassIP54Output Connection TypeWR 975Output Connection波导Isolator没有Power-Supply开关式 -
去胶设备
Artikelnr.: MA1250D-118BB
Type of tool研发/试产设备Line Voltage [V]480Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4N2Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
去胶设备
Artikelnr.: MA3000D-271BB
Type of tool高产能设备Line Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4O2Process gas 5–Process gas 6–Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
去胶设备
Artikelnr.: MA3000D-301BB
Type of tool高产能设备Line Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors5Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
电源, Linear
Artikelnr.: MS015KE-114DG
Frequency [MHz]2450Output Power CW [W]15000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]–Line Voltage [V]480Mains voltage control circuit [V]–Line Frequency [Hz]50 / 60Cooling风冷Pulse output power max [W]–Front-Panel (HMI)无前面板InterfaceRS-232Interface 2操作单元Interface 3–Interface 4–Interface 5–Width [mm (inch)]806 (31,73)Height [mm (inch)]2202 (86,69)Depth [mm (inch)]676,7 (26,64)Protection ClassIP54Isolator没有Power-Supply线性 -
电源, Linear
Artikelnr.: MS100KE-511DE
Frequency [MHz]915Output Power CW [W]100000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]–Line Voltage [V]480Mains voltage control circuit [V]–Line Frequency [Hz]50Cooling空气-水 热交换器Pulse output power max [W]–Front-Panel (HMI)无前面板InterfaceA/DInterface 2操作单元Interface 3–Interface 4–Interface 5–Width [mm (inch)]1206 (47,48)Height [mm (inch)]2262 (89,06)Depth [mm (inch)]1108 (43,62)Protection ClassIP54Isolator没有Power-Supply线性