Muegge Products

480

480
  • Decapsulation-Tool

    Item number: MA1250D-114BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
  • Generator

    Item number: MG030KG-511KE

    Frequency [Mhz]
    915
    Output Power [W]
    50000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    -
    Line Voltage [V]
    480
    Mains voltage control circuit [V]
    -
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    -
    Interface
    Control panel
    Interface 2
    EtherCAT
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    1206 (47,48)
    Height [mm (inch)]
    2160 (85,04)
    Depth [mm (inch)]
    805 (31,69)
    Protection
    IP54
    Output Connection Type
    WR 975
    Output Connection
    Waveguide
    Isolator
    No
    Power-Supply
    Switch-Mode
  • Generator

    Item number: MG050KG-511KE

    Frequency [Mhz]
    915
    Output Power [W]
    50000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    -
    Line Voltage [V]
    480
    Mains voltage control circuit [V]
    -
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    -
    Interface
    Control panel
    Interface 2
    EtherCAT
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    1206 (47,48)
    Height [mm (inch)]
    2160 (85,04)
    Depth [mm (inch)]
    805 (31,69)
    Protection
    IP54
    Output Connection Type
    WR 975
    Output Connection
    Waveguide
    Isolator
    No
    Power-Supply
    Switch-Mode
  • Generator

    Item number: MG050KG-512KE

    Frequency [Mhz]
    915
    Output Power [W]
    50000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    -
    Line Voltage [V]
    480
    Mains voltage control circuit [V]
    -
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    -
    Interface
    Control panel
    Interface 2
    EtherCAT
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    1206 (47,48)
    Height [mm (inch)]
    2160 (85,04)
    Depth [mm (inch)]
    805 (31,69)
    Protection
    IP54
    Output Connection Type
    WR 975
    Output Connection
    Waveguide
    Isolator
    No
    Power-Supply
    Switch-Mode
  • Generator

    Item number: MG050KG-513KE

    Frequency [Mhz]
    915
    Output Power [W]
    50000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    -
    Line Voltage [V]
    480
    Mains voltage control circuit [V]
    -
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    -
    Interface
    Control panel
    Interface 2
    EtherCAT
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    1206 (47,48)
    Height [mm (inch)]
    2160 (85,04)
    Depth [mm (inch)]
    805 (31,69)
    Protection
    IP54
    Output Connection Type
    WR 975
    Output Connection
    Waveguide
    Isolator
    No
    Power-Supply
    Switch-Mode
  • Power-Supply

    Item number: MX010KD-155KL

    Frequency [Mhz]
    2450
    Output Power [W]
    10000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    2~ (L1 / L2 / PE) / 1~ (L / N / PE)
    Line Voltage [V]
    480
    Mains voltage control circuit [V]
    208 / 230
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH010KS-250BF
    Power-Supply
    Switch-Mode
  • Power-Supply

    Item number: MX3000D-172KL

    Frequency [Mhz]
    2450
    Output Power [W]
    3000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    2~ (L1 / L2 / PE) / 1~ (L / N / PE)
    Line Voltage [V]
    480
    Mains voltage control circuit [V]
    208 / 230
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    6000
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH3000S-250BF, MH3000S-251BF, MH3000S-252BF
    Power-Supply
    Switch-Mode
  • Power-Supply

    Item number: MX3000D-175KL

    Frequency [Mhz]
    2450
    Output Power [W]
    3000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    2~ (L1 / L2 / PE) / 1~ (L / N / PE)
    Line Voltage [V]
    480
    Mains voltage control circuit [V]
    208 / 230
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH3000S-250BF, MH3000S-251BF, MH3000S-252BF
    Power-Supply
    Switch-Mode