Muegge Products

Plasma systems

MUEGGE develops highly specialized plasma systems, tailored to your most sensitive applications. That includes plasma systems for processes requiring high removal rates at highest selectivity. Our products will help you to quickly find a cost-efficient solution.

Plasma systems
  • Decapsulation-Tool

    Item number MA1250D-114BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Countertop size [mm (inch)]
    245 x 245 (9.65 x 9.65)
  • Decapsulation-Tool

    Item number MA3000D-211BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Temperature sensors
    -
    Countertop size [mm (inch)]
    320 x 320 (12.60 x 12.60)
  • Decapsulation-Tool

    Item number MA3000D-241BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Temperature sensors
    -
    Countertop size [mm (inch)]
    320 x 320 (12.60 x 12.60)
  • Decapsulation-Tool

    Item number MA3000D-281BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    -
    Countertop size [mm (inch)]
    320 x 320 (12.60 x 12.60)
  • Decapsulation-Tool

    Item number MA3000D-311BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Temperature sensors
    -
    Countertop size [mm (inch)]
    320 x 320 (12.60 x 12.60)
  • Stripping-Tool

    Item number MA1250D-112BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Countertop size [mm (inch)]
    245 x 245 (9.65 x 9.65)
  • Stripping-Tool

    Item number MA1250D-115BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Countertop size [mm (inch)]
    245 x 245 (9.65 x 9.65)
  • Stripping-Tool

    Item number MA1250D-117BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Countertop size [mm (inch)]
    245 x 245 (9.65 x 9.65)

Plasma systems

Semiconductor devices are indispensable for products in our daily life. A future without them is unimaginable. The production of these components, however, requires specialized equipment and profound knowledge. With advancing technology, plasma systems and process control of plasma-based applications are facing new challenges.

 

We work closely together with clients and research facilities in order to understand the market and provide you with the best microwave solutions. We go the extra mile – beyond conventional plasma approaches – to develop products that take your process and results even further. Our leading position in the production of microwave-assisted plasma products will help you access markets quicker with customized systems at lowest cost of ownership:

 

  • SU-8 removal
  • Highly selective removal of organic materials
  • Non-oxidizing chemistry for cleaning of oxygen sensitive materials (H2 process)
  • Cleaning of 3D structures
  • Damage-free cleaning of sensitive surfaces (e.g. sensors)
  • Isotropic chamber cleaning
  • LIGA process (lithography, electroplating and molding)

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

sales@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA