Muegge Products

Plasma components

Plasma components
  • Atmospheric Plasma Source

    Item number: MA075KA-019BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power [W]
    75000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    outer ø131 mm. inner ø80 mm
    More details
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  • Atmospheric Plasma Source

    Item number: MA6000A-013BB

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power [W]
    6000
    Frequency [MHz]
    2450
    Waveguide size
    WR340 / R26
    Reactor outlet
    ø30 mm x 1,5 mm x 200 mm
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  • Down-Streem-Plasma-Source

    Item number: MA010KD-013BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    -
    Output Power [W]
    10000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    -
    More details
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  • Down-Streem-Plasma-Source

    Item number: MA100KD-013BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    -
    Output Power [W]
    100000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    -

    Down-Streem-Plasma-Quelle

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  • Plasma array (large area)

    Item number: MA4000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

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  • Plasma array (large area)

    Item number: MA4000Y-083BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    3000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

    More details
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  • Plasma array (large area)

    Item number: MA4000Y-093BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

    More details
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  • Plasma array (large area)

    Item number: MA4000Y-103BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 338 mm x 408 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

    More details
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MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.