Muegge Products

Plasma components

Plasma components
  • Atmospheric Plasma Source

    Item number: MA075KA-019BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power [W]
    75000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    outer ø131 mm. inner ø80 mm
  • Atmospheric Plasma Source

    Item number: MA6000A-013BB

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power [W]
    6000
    Frequency [MHz]
    2450
    Waveguide size
    WR340 / R26
    Reactor outlet
    ø30 mm x 1,5 mm x 200 mm
  • Down-Stream-Plasma-Source

    Item number: MA010KD-013BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    -
    Output Power [W]
    10000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    -
  • Down-Stream-Plasma-Source

    Item number: MA100KD-013BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    -
    Output Power [W]
    100000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    -

    Down-Streem-Plasma-Quelle

  • Plasma array (large area)

    Item number: MA4000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-083BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    3000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-093BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-103BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 338 mm x 408 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.