Muegge Products

Plasma components

MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.

Plasma components
  • Plasma array (large area)

    Item number MA4000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-083BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    3000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-093BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-103BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 338 mm x 408 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2x 2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-123BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-153BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Double

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA6000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 700 mm x 226 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2x 3000
    Frequency [Mhz]
    2450
    Shower-Head
    Double

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA6000Y-023BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 797,5 mm x 150 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2x 3000
    Frequency [Mhz]
    2450
    Shower-Head
    Double

    Flächenplasmaquelle

Plasma components

Semiconductor technology has changed the way we see the world. Plasma treatment, however, made it possible to make products for everyone. High-density microwave-assisted plasma sources perform best in etching and coating equipment requiring high etch rates without charge damage or ion-induced physical etching.

Our leading role as manufacturer of plasma components will help you develop and integrate your systems to achieve quick market entry at lowest cost of ownership. Our ready-to-use product range of plasma components includes solutions for a variety of fabrication tools and applications:

 

  • High-density deposition of oxide and nitride layers
  • Large-surface deposition and etching
  • SU-8 removal
  • Highly selective removal of organic materials
  • Non-oxidizing chemistry for cleaning of oxygen sensitive materials (H2 process)
  • Damage-free cleaning of sensitive surfaces (e.g. sensors) and 3D structures
  • Isotropic chamber cleaning
  • LIGA process (lithography, electroplating and molding)

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

sales@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA