Muegge Products

Plasma components

Plasma components
  • Plasma array (large area)

    Item number MA4000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-083BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    3000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-093BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-103BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 338 mm x 408 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2x 2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-123BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA4000Y-153BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2000
    Frequency [Mhz]
    2450
    Shower-Head
    Double

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA6000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 700 mm x 226 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2x 3000
    Frequency [Mhz]
    2450
    Shower-Head
    Double

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number MA6000Y-023BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 797,5 mm x 150 mm
    Material Plasma Chamber
    Ceramics
    Mains voltage nominal [V]
    -
    Output Power [W]
    2x 3000
    Frequency [Mhz]
    2450
    Shower-Head
    Double

    Flächenplasmaquelle

MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.