MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.
Semiconductor technology has changed the way we see the world. Plasma treatment, however, made it possible to make products for everyone. High-density microwave-assisted plasma sources perform best in etching and coating equipment requiring high etch rates without charge damage or ion-induced physical etching.
Our leading role as manufacturer of plasma components will help you develop and integrate your systems to achieve quick market entry at lowest cost of ownership. Our ready-to-use product range of plasma components includes solutions for a variety of fabrication tools and applications: