Muegge Products
Plasma components
-
Atmospheric Plasma Source
Item number: MA075KA-019BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric materialQuartzOutput Power [W]75000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outletouter ø131 mm. inner ø80 mmWatchlistWatchlist -
Atmospheric Plasma Source
Item number: MA6000A-013BB
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric materialQuartzOutput Power [W]6000Frequency [MHz]2450Waveguide sizeWR340 / R26Reactor outletø30 mm x 1,5 mm x 200 mmWatchlistWatchlist -
Down-Streem-Plasma-Source
Item number: MA010KD-013BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric material-Output Power [W]10000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outlet-WatchlistWatchlist -
Down-Streem-Plasma-Source
Item number: MA100KD-013BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric material-Output Power [W]100000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outlet-Down-Streem-Plasma-Quelle
WatchlistWatchlist -
Plasma array (large area)
Item number: MA4000Y-013BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
WatchlistWatchlist -
Plasma array (large area)
Item number: MA4000Y-083BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]3000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
WatchlistWatchlist -
Plasma array (large area)
Item number: MA4000Y-093BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
WatchlistWatchlist -
Plasma array (large area)
Item number: MA4000Y-103BC
ProcessEtching & DepositionOutput Connection TypePlasma area 338 mm x 408 mmDielectric materialCeramicsOutput Power [W]2x 2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
WatchlistWatchlist
MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.