MUEGGE 产品
等离子系统
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解封装设备
货号: MA1250D-114BB
设备型号研发/试产设备供电电压[V]480工艺气体 1O2工艺气体 1CF4工艺气体 3N2工艺气体 4–工艺气体 5–工艺气体 6–温度传感器–腔室尺寸[mm (inch)]245 x 245 (9.65 x 9.65)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
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解封装设备
货号: MA3000D-211BB
设备型号高产能设备供电电压[V]400工艺气体 1O2工艺气体 1O2工艺气体 3N2工艺气体 4CF4工艺气体 5SF6工艺气体 6Ar温度传感器–腔室尺寸[mm (inch)]320 x 320 (12.60 x 12.60)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
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解封装设备
货号: MA3000D-241BB
设备型号高产能设备供电电压[V]400工艺气体 1O2工艺气体 1O2工艺气体 3CF4工艺气体 4N2H2工艺气体 5SF6工艺气体 6N2温度传感器–腔室尺寸[mm (inch)]320 x 320 (12.60 x 12.60)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
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解封装设备
货号: MA3000D-281BB
设备型号高产能设备供电电压[V]400工艺气体 1O2工艺气体 1N2H2工艺气体 3CF4工艺气体 4N2工艺气体 5–工艺气体 6–温度传感器–腔室尺寸[mm (inch)]320 x 320 (12.60 x 12.60)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
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解封装设备
货号: MA3000D-311BB
设备型号高产能设备供电电压[V]400工艺气体 1O2工艺气体 1O2工艺气体 3N2工艺气体 4Ar工艺气体 5CF4工艺气体 6SF6温度传感器–腔室尺寸[mm (inch)]320 x 320 (12.60 x 12.60)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
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去胶设备
货号: MA1250D-112BB
设备型号研发/试产设备供电电压[V]400工艺气体 1O2工艺气体 1CF4工艺气体 3N2工艺气体 4–工艺气体 5–工艺气体 6–温度传感器2腔室尺寸[mm (inch)]245 x 245 (9.65 x 9.65)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
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去胶设备
货号: MA1250D-115BB
设备型号研发/试产设备供电电压[V]208工艺气体 1O2工艺气体 1N2工艺气体 3N2工艺气体 4–工艺气体 5–工艺气体 6–温度传感器2腔室尺寸[mm (inch)]245 x 245 (9.65 x 9.65)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
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去胶设备
货号: MA1250D-117BB
设备型号研发/试产设备供电电压[V]400工艺气体 1O2工艺气体 1N2工艺气体 3CF4工艺气体 4–工艺气体 5–工艺气体 6–温度传感器2腔室尺寸[mm (inch)]245 x 245 (9.65 x 9.65)You are currently viewing a placeholder content from Google Maps. To access the actual content, click the button below. Please note that doing so will share data with third-party providers. More Information Unblock content Accept required service and unblock content
等离子体系统
半导体元器件已经成为我们日常生活中不可缺少的产品。没有人愿意想象一个没有他们的未来。然而,这些设备的制造需要高精尖的设备和深入的工艺知识–随着技术的进步,等离子体和等离子体辅助应用的控制所面临的挑战也在增加。
我们与客户和研究机构密切合作,了解市场,并为您提供最佳的微波解决方案–超越传统的等离子体方法,开发出能显著改善您的结果和流程的产品。作为微波辅助等离子体产品的制造商,我们的领先地位可以帮助您以更快的速度和更高的成本效益进入市场的定制系统:
- SU-8距离
- 高度选择性地去除有机物质
- 用于清洗对氧气敏感的材料的非氧化性化学方法(H2工艺)
- 3D结构的清理
- 敏感表面(如传感器)的无损清洁
- 各向同性室清洁
- LIGA工艺(光刻、电镀和成型)