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等离子系统

等离子系统
  • 解封装设备

    Artikelnr.: MA1250D-114BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-211BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-241BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-281BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-311BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 去胶设备

    Artikelnr.: MA1250D-112BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 去胶设备

    Artikelnr.: MA1250D-115BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 去胶设备

    Artikelnr.: MA1250D-117BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details

等离子体系统

半导体元器件已经成为我们日常生活中不可缺少的产品。没有人愿意想象一个没有他们的未来。然而，这些设备的制造需要高精尖的设备和深入的工艺知识–随着技术的进步，等离子体和等离子体辅助应用的控制所面临的挑战也在增加。

我们与客户和研究机构密切合作，了解市场，并为您提供最佳的微波解决方案–超越传统的等离子体方法，开发出能显著改善您的结果和流程的产品。作为微波辅助等离子体产品的制造商，我们的领先地位可以帮助您以更快的速度和更高的成本效益进入市场的定制系统：

  • SU-8距离
  • 高度选择性地去除有机物质
  • 用于清洗对氧气敏感的材料的非氧化性化学方法（H2工艺）
  • 3D结构的清理
  • 敏感表面（如传感器）的无损清洁
  • 各向同性室清洁
  • LIGA工艺（光刻、电镀和成型）