Muegge Products

Plasma components

Plasma components
  • Atmospheric-Plasma-Source

    Item number: MA075KA-019BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power CW [W]
    75000
    Frequency [Mhz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    outer ø131 mm. inner ø80 mm
  • Atmospheric-Plasma-Source

    Item number: MA6000A-013BB

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power CW [W]
    6000
    Frequency [Mhz]
    2450
    Waveguide size
    WR340 / R26
    Reactor outlet
    ø30 mm x 1,5 mm x 200 mm
  • Down-Stream-Plasma-Source

    Item number: MA010KD-013BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    -
    Output Power CW [W]
    10000
    Frequency [Mhz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    -
  • Down-Stream-Plasma-Source

    Item number: MA100KD-013BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    -
    Output Power CW [W]
    100000
    Frequency [Mhz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    -

    Down-Streem-Plasma-Source

  • Plasma array (large area)

    Item number: MA4000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2000
    Frequency [Mhz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-083BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    3000
    Frequency [Mhz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-093BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2000
    Frequency [Mhz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-103BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 338 mm x 408 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2x 2000
    Frequency [Mhz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

PLASMA COMPONENTS

Semiconductor technology has changed our view of the world – but plasma processing has made it possible to produce products for everyone. High-density microwave-assisted plasma sources perform superiorly in etching and deposition systems that require high etching rates without electrical charging or damage to the material.

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Our leading role as a manufacturer of plasma components helps you to develop and adapt your systems – while ensuring fast market entry and low CoO. As part of our “”turnkey”” product range, we offer plasma components for a variety of different production tools and applications:

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  • High density deposition of oxide and nitride layers
  • SU-8 distance

  • Highly selective removal of organic materials
  • Non-oxidizing chemistry for cleaning of oxygen sensitive materials (H2 process)
  • Damage-free cleaning of sensitive surfaces (e.g. sensors) and 3D structures
  • Isotropic chamber cleaning
  • LIGA process (lithography, electroplating and shaping)