Impulses
from experts

Many industries are discovering microwave and plasma technology for themselves - in order to accelerate processes, to make them more precise and more energy-efficient. As the world's leading manufacturer, our experts are at the source of developments. Go deeper into the subject matter of the energy solutions of the future in the MUEGGE blog.
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Automotive / Lab-Grown-Diamonds / MEMS / Microwave-Technology / Semi-Conductor Reflected Power in Microwave (-Plasma) Processes
The reflected power is defined as the portion of the generated microwave power that is not coupled into the process and that returns back to …
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Product
Semi-Conductor Microwave and Chamber-Clean
Chamber-Clean after Dielectrics Deposition – A case for isotropic microwave plasma As deposition is one of the pillars of semiconductor production, it depends on a …
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Automotive / MEMS / Microwave-Technology / Semi-Conductor 3D-Simulation: Slim Down Your Component Development Process
While developing thermoprocessing equipment, testing of prototypes and numerous repetitions cost plenty oftime and resources. 3D simulation capabilities allow you to speed up your prototyping …
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Product
MEMS / Semi-Conductor Photoresist Removal after High Dose Implant (HDIS)
High Dose Implant Strip (HDIS) – Challengeable process in semiconductor manufacturing Photoresist strip after high dose implant strip remains one of the most demanding processes …
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MEMS / Semi-Conductor Endpoint Control for Thick Photoresist Removal
Complete removal of thick photoresist needs proper endpoint detection Applying microwave (MW) plasma to remove thick resist such as used for micro-machinery and microelectromechanical systems …
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MEMS / Semi-Conductor Quality Improvement in Micromachinery and MEMS
Removal of thick and embedded photoresist – A case for isotropic microwave plasma Microwave plasma is the perfect solution for removing thick resist such as …
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Progress is in the details. Find out about current findings and progressive application developments in microwave and plasma technology - directly from our experts, tailored to your process optimization.

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

info@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

info@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA

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