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蚀刻和沉积(涂层)
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等离子阵列(大面积)
Artikelnr.: MA4000Y-013BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 320 mm x 320 mmDielectric material陶瓷Mains voltage nominal [V]–Output Power CW [W]2000Frequency [MHz]2450Gas manifold单Waveguide size同轴Reactor outlet-Flächenplasmaquelle
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等离子阵列(大面积)
Artikelnr.: MA4000Y-083BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 320 mm x 320 mmDielectric material陶瓷Output Power CW [W]3000Frequency [MHz]2450Gas manifold单Flächenplasmaquelle
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等离子阵列(大面积)
Artikelnr.: MA4000Y-093BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 320 mm x 320 mmDielectric material陶瓷Output Power CW [W]2000Frequency [MHz]2450Gas manifold单Flächenplasmaquelle
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等离子阵列(大面积)
Artikelnr.: MA4000Y-103BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 338 mm x 408 mmDielectric material陶瓷Mains voltage nominal [V]–Output Power CW [W]2x 2000Frequency [MHz]2450Gas manifold单Flächenplasmaquelle
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等离子阵列(大面积)
Artikelnr.: MA4000Y-123BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 320 mm x 320 mmDielectric material陶瓷Mains voltage nominal [V]–Output Power CW [W]2000Frequency [MHz]2450Gas manifold单Waveguide size同轴Reactor outlet-Flächenplasmaquelle
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等离子阵列(大面积)
Artikelnr.: MA4000Y-153BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 320 mm x 320 mmDielectric material陶瓷Output Power CW [W]2000Frequency [MHz]2450Gas manifold双Flächenplasmaquelle
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等离子阵列(大面积)
Artikelnr.: MA6000Y-013BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 700 mm x 226 mmDielectric material陶瓷Output Power CW [W]2x 3000Frequency [MHz]2450Gas manifold双Flächenplasmaquelle
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等离子阵列(大面积)
Artikelnr.: MA6000Y-023BC
Process蚀刻和沉积(涂层)Output Connection Type等离子区 797,5 mm x 150 mmDielectric material陶瓷Output Power CW [W]2x 3000Frequency [MHz]2450Gas manifold双Flächenplasmaquelle