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2x 3000

2x 3000
  • 等离子阵列（大面积）

    Artikelnr.: MA6000Y-013BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 700 mm x 226 mm
    Dielectric material
    陶瓷
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    双

    Flächenplasmaquelle

    Mehr Details
  • 等离子阵列（大面积）

    Artikelnr.: MA6000Y-023BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 797,5 mm x 150 mm
    Dielectric material
    陶瓷
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    双

    Flächenplasmaquelle

    Mehr Details
  • 等离子阵列（大面积）

    Artikelnr.: MA6000Y-033BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 520 mm x 340 mm
    Dielectric material
    陶瓷
    Mains voltage nominal [V]
    –
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    双
    Waveguide size
    同轴
    Reactor outlet
    ø20 mm x 1,5 mm x 564 mm

    Flächenplasmaquelle

    Mehr Details
  • 电源, High-Pulse

    Artikelnr.: MP010KG-113TS

    Frequency [MHz]
    2450
    Output Power CW [W]
    2x 3000
    Line connection
    3~ (L1 / L2 / L3 / N / PE)
    Control circuit connection [V]
    –
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    –
    Line Frequency [Hz]
    50
    Cooling
    风冷
    Pulse output power max [W]
    2x 10000
    Front-Panel (HMI)
    无前面板
    Interface
    Profinet
    Interface 2
    –
    Interface 3
    –
    Interface 4
    –
    Interface 5
    –
    Width [mm (inch)]
    606 (23,86)
    Height [mm (inch)]
    2062 (81,18)
    Depth [mm (inch)]
    881 (34,69)
    Protection Class
    IP00
    Isolator
    没有
    Power-Supply
    High-Pulse
    Mehr Details