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  • Atmospheric Plasma Source

    Artikelnr.: MA075KA-019BF

    Process
     气体/物料转换
    Output Connection Type
    others
    Dielectric material
    石英
    Output Power CW [W]
    75000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    outer ø131 mm. inner ø80 mm
    Mehr Details
  • 自由基等离子源（远程等离子源）

    Artikelnr.: MA1250C-003BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    ISO-K63
    Dielectric material
    陶瓷
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    1250
    Frequency [MHz]
    2450
    Gas manifold
    –
    Reactor outlet
    -

    Radikalquelle (Remote-Plasma-Quelle)

    Mehr Details
  • 自由基等离子源（远程等离子源）

    Artikelnr.: MA3000C-863BB

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    KF40
    Dielectric material
    蓝宝石
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    3000
    Frequency [MHz]
    2450
    Gas manifold
    –
    Reactor outlet
    -

    Radikalquelle (Remote-Plasma-Quelle)

    Mehr Details