Muegge Products

Ceramics

Ceramics
  • Plasma array (large area)

    Item number: MA6000Y-033BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 520 mm x 340 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

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  • Radical plasma source (Remote Plasma Source)

    Item number: MA1250C-003BC

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    1250
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

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  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-083BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

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  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-123BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

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  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-133BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

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  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-223BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

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  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-233BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

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  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-703BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

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