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  • Plasma array (large area)

    Item number: MA6000Y-023BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 797,5 mm x 150 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details
    WatchlistBereits auf der Merkliste
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  • Magnetron-Head

    Item number: MH015KS-512DD

    Frequency [MHz]
    915
    Output Power [W]
    15000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Cooling
    Water
    Pulse output power max [W]
    -
    Protection
    IP54
    Output Connection Type
    WR975 / R9
    Output Connection
    Waveguide
    Isolator
    No
    More details
    WatchlistBereits auf der Merkliste
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  • Power-Supply

    Item number: MS100KE-510DE

    Frequency [MHz]
    915
    Output Power [W]
    100000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    -
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    -
    Line Frequency [Hz]
    50
    Cooling
    Air-water heat exchanger
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    No Front-Panel
    Interface
    A/D
    Interface 2
    -
    Interface 3
    -
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    1212 (47,72)
    Height [mm (inch)]
    2261 (89,02)
    Depth [mm (inch)]
    1071,5 (42,19)
    Protection
    IP54
    Isolator
    No
    Power-Supply
    Linear
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Magnetron

    Item number: MB2578A-120FK

    OEM Item Number
    MB2578A-120FK
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450
    ISM Band
    S-Band
    Cooling
    water-cooled
    Orientation of HV and cooling connectors
    180°
    Fastening / Studs
    4 x Through-hole 5,8 (no studs)
    Orientation HV to fastening
    0°
    Magnet
    Packaged magnet
    Cooling Connector Type
    G1/8" Female Thread
    Temperature sensor
    -
    More details
    WatchlistBereits auf der Merkliste
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  • Power-Supply

    Item number: MX6000D-154KD

    Frequency [MHz]
    2450
    Output Power [W]
    6000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    Modbus RTU
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH6000S-250BF, MH6000S-251BF
    Power-Supply
    Switch-Mode
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Water load

    Item number: GA1211-1

    Frequency [MHz]
    2450
    Output Power [W]
    3000
    Waveguide size
    WR284 / R32
    Flange
    UDR
    Product group
    Water load
    Type
    Water load
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Motor-Tuner

    Item number: GA1007

    Frequency [MHz]
    2450
    Output Power [W]
    3000
    Waveguide size
    WR284 / R32
    Flange
    UDR
    Product group
    Tuner
    Type
    Motor-Tuner
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • directional coupler on waveguide

    Item number: GA3003

    Frequency [MHz]
    2450
    Output Power [W]
    6000
    Waveguide size
    WR284 / R32
    Flange
    Q-D
    Product group
    Performance measurement
    Type
    directional coupler on waveguide
    More details
    WatchlistBereits auf der Merkliste
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  • Twist

    Item number: GA2320

    Frequency [MHz]
    2450
    Output Power [W]
    -
    Waveguide size
    WR284 / R32
    Flange
    Q-D
    Product group
    Waveguide
    Type
    Twist
    More details
    WatchlistBereits auf der Merkliste
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  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-823BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Sapphire
    Mains voltage nominal [V]
    230 / 208
    Output Power [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details
    WatchlistBereits auf der Merkliste
    Watchlist

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Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

info@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA

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Your Muegge Contact

Sales

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

info@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA

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