- MA6000Y-023BC
Item number: MA6000Y-023BC

Additional information

Typ

Process

Output Connection Type

Dielectric material

Output Power [W]

Frequency [MHz]

Gas manifold

A combination of duo-plasmalines can be used to obtain a two dimensional plasma array. Single sources as well as 2, 4 and 8 parallel arranged plasmalines are available for plasma assisted surface treatment like surface activating, etching and deposition.

  • Low pressure mirowave plasma source
  • Suitable for cleaning, etching, ashing, deposition, sterilization, pretreatment
  • Compact design
  • Easy adaption to customer systems
  • Integrated gas shower
  • High plasma density
  • High efficiency
Watchlist
Watchlist

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Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

info@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

info@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA

MUEGGE
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