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  • 去胶设备

    Artikelnr.: MA3000D-221BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    5
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    Mehr Details
  • 去胶设备

    Artikelnr.: MA3000D-301BB

    Type of tool
    高产能设备
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    5
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    Mehr Details