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解封装设备
Artikelnr.: MA1250D-114BB
Type of tool研发/试产设备Line Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors–Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
解封装设备
Artikelnr.: MA3000D-281BB
Type of tool高产能设备Line Voltage [V]400Process gas 1O2Process gas 2N2H2Process gas 3CF4Process gas 4N2Process gas 5–Process gas 6–Product Temperature sensors–Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
去胶设备
Artikelnr.: MA1250D-112BB
Type of tool研发/试产设备Line Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
去胶设备
Artikelnr.: MA1250D-115BB
Type of tool研发/试产设备Line Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
去胶设备
Artikelnr.: MA1250D-117BB
Type of tool研发/试产设备Line Voltage [V]400Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
去胶设备
Artikelnr.: MA1250D-118BB
Type of tool研发/试产设备Line Voltage [V]480Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4N2Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
去胶设备
Artikelnr.: MA3000D-201BB
Type of tool高产能设备Line Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4O2Process gas 5–Process gas 6–Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
去胶设备
Artikelnr.: MA3000D-221BB
Type of tool高产能设备Line Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors5Chamber size [mm (inch)]470 x 470 (18.50 x 18.50)