Muegge Produkte

Ar

Ar
  • 解封装设备

    Artikelnr.: MA3000D-311BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details