MUEGGE 产品

  • 解封装设备

    货号: MA1250D-114BB

    设备型号
    研发/试产设备
    供电电压[V]
    480
    工艺气体 1
    O2
    工艺气体 1
    CF4
    工艺气体 3
    N2
    工艺气体 4
    工艺气体 5
    工艺气体 6
    温度传感器
    腔室尺寸[mm (inch)]
    245 x 245 (9.65 x 9.65)

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  • 去胶设备

    货号: MA1250D-112BB

    设备型号
    研发/试产设备
    供电电压[V]
    400
    工艺气体 1
    O2
    工艺气体 1
    CF4
    工艺气体 3
    N2
    工艺气体 4
    工艺气体 5
    工艺气体 6
    温度传感器
    2
    腔室尺寸[mm (inch)]
    245 x 245 (9.65 x 9.65)

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  • 去胶设备

    货号: MA1250D-115BB

    设备型号
    研发/试产设备
    供电电压[V]
    208
    工艺气体 1
    O2
    工艺气体 1
    N2
    工艺气体 3
    N2
    工艺气体 4
    工艺气体 5
    工艺气体 6
    温度传感器
    2
    腔室尺寸[mm (inch)]
    245 x 245 (9.65 x 9.65)

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  • 去胶设备

    货号: MA1250D-117BB

    设备型号
    研发/试产设备
    供电电压[V]
    400
    工艺气体 1
    O2
    工艺气体 1
    N2
    工艺气体 3
    CF4
    工艺气体 4
    工艺气体 5
    工艺气体 6
    温度传感器
    2
    腔室尺寸[mm (inch)]
    245 x 245 (9.65 x 9.65)

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  • 去胶设备

    货号: MA3000D-221BB

    设备型号
    高产能设备
    供电电压[V]
    400
    工艺气体 1
    O2
    工艺气体 1
    CF4
    工艺气体 3
    N2
    工艺气体 4
    工艺气体 5
    工艺气体 6
    温度传感器
    5
    腔室尺寸[mm (inch)]
    470 x 470 (18.50 x 18.50)

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  • 去胶设备

    货号: MA3000D-251BB

    设备型号
    高产能设备
    供电电压[V]
    400
    工艺气体 1
    O2
    工艺气体 1
    CF4
    工艺气体 3
    N2
    工艺气体 4
    工艺气体 5
    工艺气体 6
    温度传感器
    9
    腔室尺寸[mm (inch)]
    470 x 470 (18.50 x 18.50)

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  • 去胶设备

    货号: MA3000D-301BB

    设备型号
    高产能设备
    供电电压[V]
    480
    工艺气体 1
    O2
    工艺气体 1
    CF4
    工艺气体 3
    N2
    工艺气体 4
    工艺气体 5
    工艺气体 6
    温度传感器
    5
    腔室尺寸[mm (inch)]
    470 x 470 (18.50 x 18.50)

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