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O2

O2
  • 解封装设备

    Artikelnr.: MA1250D-114BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-211BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-241BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-281BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 解封装设备

    Artikelnr.: MA3000D-311BB

    Type of tool
    高产能设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 去胶设备

    Artikelnr.: MA1250D-112BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 去胶设备

    Artikelnr.: MA1250D-115BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 去胶设备

    Artikelnr.: MA1250D-117BB

    Type of tool
    研发/试产设备
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details