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  • 等离子阵列（大面积）

    Artikelnr.: MA4000Y-013BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 320 mm x 320 mm
    Dielectric material
    陶瓷
    Mains voltage nominal [V]
    –
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    单
    Waveguide size
    同轴
    Reactor outlet
    -

    Flächenplasmaquelle

    Mehr Details
  • 等离子阵列（大面积）

    Artikelnr.: MA4000Y-123BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 320 mm x 320 mm
    Dielectric material
    陶瓷
    Mains voltage nominal [V]
    –
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    单
    Waveguide size
    同轴
    Reactor outlet
    -

    Flächenplasmaquelle

    Mehr Details
  • 等离子阵列（大面积）

    Artikelnr.: MA6000Y-033BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 520 mm x 340 mm
    Dielectric material
    陶瓷
    Mains voltage nominal [V]
    –
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    双
    Waveguide size
    同轴
    Reactor outlet
    ø20 mm x 1,5 mm x 564 mm

    Flächenplasmaquelle

    Mehr Details
  • 直波导

    Artikelnr.: GA2206

    Frequency [MHz]
    2450
    Output Power CW [W]
    3000
    Waveguide size
    同轴
    Flange
    Coaxial
    Product group
    波导
    Type
    直波导
    Mehr Details
  • 喇叭及天线

    Artikelnr.: GA2507

    Frequency [MHz]
    915
    Output Power CW [W]
    5000
    Waveguide size
    同轴
    Flange
    Coaxial
    Product group
    波导
    Type
    喇叭及天线
    Mehr Details
  • 手动3销钉调谐器

    Artikelnr.: GA1031

    Frequency [MHz]
    915
    Output Power CW [W]
    5000
    Waveguide size
    同轴
    Flange
    UDR
    Product group
    调谐器
    Type
    手动3销钉调谐器
    Mehr Details
  • 水负载

    Artikelnr.: GA1238

    Frequency [MHz]
    915
    Output Power CW [W]
    5000
    Waveguide size
    同轴
    Flange
    Coaxial
    Product group
    水负载
    Type
    水负载
    Mehr Details