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  • 等离子阵列（大面积）

    Artikelnr.: MA4000Y-153BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 320 mm x 320 mm
    Dielectric material
    陶瓷
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    双

    Flächenplasmaquelle

    Mehr Details
  • 等离子阵列（大面积）

    Artikelnr.: MA6000Y-013BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 700 mm x 226 mm
    Dielectric material
    陶瓷
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    双

    Flächenplasmaquelle

    Mehr Details
  • 等离子阵列（大面积）

    Artikelnr.: MA6000Y-023BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 797,5 mm x 150 mm
    Dielectric material
    陶瓷
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    双

    Flächenplasmaquelle

    Mehr Details
  • 等离子阵列（大面积）

    Artikelnr.: MA6000Y-033BC

    Process
    蚀刻和沉积（涂层)
    Output Connection Type
    等离子区 520 mm x 340 mm
    Dielectric material
    陶瓷
    Mains voltage nominal [V]
    –
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    双
    Waveguide size
    同轴
    Reactor outlet
    ø20 mm x 1,5 mm x 564 mm

    Flächenplasmaquelle

    Mehr Details