Muegge Products

CF4

CF4
  • Decapsulation-Tool

    Item number: MA3000D-241BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Product Temperature sensors
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)

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  • Decapsulation-Tool

    Item number: MA3000D-281BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    Process gas 6
    Product Temperature sensors
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)

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  • Stripping-Tool

    Item number: MA1250D-117BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    Process gas 5
    Process gas 6
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)

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  • Stripping-Tool

    Item number: MA1250D-118BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    Process gas 6
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)

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