Muegge Products

R&D / Pilot Production Tool

R&D / Pilot Production Tool
  • Decapsulation-Tool

    Item number: MA1250D-114BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-112BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-115BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-117BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-118BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details