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Decapsulation-ToolArtikelnr.: MA3000D-211BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4CF4Process gas 5SF6Process gas 6ArProduct Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Artikelnr.: MA3000D-241BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3CF4Process gas 4N2H2Process gas 5SF6Process gas 6N2Product Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Artikelnr.: MA3000D-281BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2N2H2Process gas 3CF4Process gas 4N2Process gas 5-Process gas 6-Product Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Artikelnr.: MA3000D-311BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4ArProcess gas 5CF4Process gas 6SF6Product Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
GeneratorArtikelnr.: MG075KI-501DL
Frequency [MHz]915Output Power CW [W]75000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]400Mains voltage control circuit [V]-Line Frequency [Hz]50CoolingWasserPulse output power max [W]-Front-Panel (HMI)BedienteilInterfaceCan-BusInterface 2A/DInterface 3BedienteilInterface 4-Interface 5-Width [mm (inch)]1219 (47,99)Height [mm (inch)]2176 (85,67)Depth [mm (inch)]1524 (60)Protection ClassIP40Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorJaPower-SupplyLinear -
Generator
Artikelnr.: MG100KI-501DL
Frequency [MHz]915Output Power CW [W]100000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]400Mains voltage control circuit [V]-Line Frequency [Hz]50CoolingWasserPulse output power max [W]-Front-Panel (HMI)BedienteilInterfaceCan-BusInterface 2A/DInterface 3BedienteilInterface 4-Interface 5-Width [mm (inch)]1219 (47,99)Height [mm (inch)]2176 (85,67)Depth [mm (inch)]1524 (60)Protection ClassIP40Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorJaPower-SupplyLinear -
GeneratorArtikelnr.: MG050KI-522DL
Frequency [MHz]915Output Power CW [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]400Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingWasserPulse output power max [W]-Front-Panel (HMI)Bedienteil mit HauptschalterInterfaceModbusInterface 2BedienteilInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]800 (31,50)Height [mm (inch)]2200 (86,62)Depth [mm (inch)]1200 (47,25)Protection ClassIP54Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorNeinPower-SupplySwitch-Mode -
Generator
Artikelnr.: MG050KI-542DL
Frequency [MHz]915Output Power CW [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]400Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingWasserPulse output power max [W]-Front-Panel (HMI)Bedienteil mit HauptschalterInterfaceCan-BusInterface 2DisplayInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]800 (31,50)Height [mm (inch)]2200 (86,62)Depth [mm (inch)]1200 (47,25)Protection ClassIP54Output Connection TypeWR 975Output ConnectionHohlleiterIsolatorNeinPower-SupplySwitch-Mode
