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SF6

SF6
  • 캡슐화 장비

    Artikelnr.: MA3000D-211BB

    Type of tool
    양산용 장비
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Product Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details
  • 캡슐화 장비

    Artikelnr.: MA3000D-241BB

    Type of tool
    양산용 장비
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Product Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    Mehr Details