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  • 캡슐화 장비

    Artikelnr.: MA1250D-114BB

    Type of tool
    R&D /파일럿 생산 장비
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    -
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • placeholder-muegge
    스트리핑 장비

    Artikelnr.: MA0000D-001BB

    Type of tool
    R&D /파일럿 생산 장비
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • placeholder-muegge
    스트리핑 장비

    Artikelnr.: MA1250D-110BB

    Type of tool
    R&D /파일럿 생산 장비
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 스트리핑 장비

    Artikelnr.: MA1250D-112BB

    Type of tool
    R&D /파일럿 생산 장비
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 스트리핑 장비

    Artikelnr.: MA1250D-115BB

    Type of tool
    R&D /파일럿 생산 장비
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 스트리핑 장비

    Artikelnr.: MA1250D-117BB

    Type of tool
    R&D /파일럿 생산 장비
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    Mehr Details
  • 스트리핑 장비

    Artikelnr.: MA3000D-221BB

    Type of tool
    양산용 장비
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    5
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    Mehr Details
  • 스트리핑 장비

    Artikelnr.: MA3000D-251BB

    Type of tool
    양산용 장비
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Product Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    Mehr Details