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스트리핑 장비
Artikelnr.: MA0000D-001BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA1250D-110BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA1250D-115BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
전원 공급 장치
Artikelnr.: MX2000D-170KL
Frequency [MHz]2450Output Power CW [W]2000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60Cooling공기 / 물Pulse output power max [W]2000Front-Panel (HMI)메인 스위치가 있는 장치Interface전면 디스플레이Interface 2CAN-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)Protection ClassIP20Isolator아니Related Magnetron HeadMH2000S-250BF, MH2000S-251BF, MH2000S-252BFPower-Supply모드 전환 -
전원 공급 장치
Artikelnr.: MX2000D-173KL
Frequency [MHz]2450Output Power CW [W]2000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60Cooling공기 / 물Pulse output power max [W]-Front-Panel (HMI)메인 스위치가 있는 장치Interface전면 디스플레이Interface 2CAN-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)Protection ClassIP20Isolator아니Related Magnetron HeadMH2000S-250BF, MH2000S-251BF, MH2000S-252BFPower-Supply모드 전환 -
전원 공급 장치
Artikelnr.: MX3000D-170KL
Frequency [MHz]2450Output Power CW [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60Cooling공기 / 물Pulse output power max [W]3000Front-Panel (HMI)메인 스위치가 있는 장치Interface전면 디스플레이Interface 2CAN-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)Protection ClassIP20Isolator아니Related Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-Supply모드 전환 -
전원 공급 장치
Artikelnr.: MX3000D-173KL
Frequency [MHz]2450Output Power CW [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60Cooling공기 / 물Pulse output power max [W]-Front-Panel (HMI)메인 스위치가 있는 장치Interface전면 디스플레이Interface 2CAN-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)Protection ClassIP20Isolator아니Related Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-Supply모드 전환 -
전원 공급 장치
Artikelnr.: MX6000D-150KG
Frequency [MHz]2450Output Power CW [W]6000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60Cooling공기 / 물Pulse output power max [W]6000Front-Panel (HMI)메인 스위치가 있는 장치Interface전면 디스플레이Interface 2CAN-BusInterface 3A/DInterface 4RS-232Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)Protection ClassIP20Isolator아니Related Magnetron HeadMH6000S-250BF, MH6000S-251BFPower-Supply모드 전환