Muegge Produkte
245 x 245 (9.65 x 9.65)
-
캡슐화 장비
Artikelnr.: MA1250D-114BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors-Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA0000D-001BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA1250D-110BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA1250D-112BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA1250D-115BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA1250D-117BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]400Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4-Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
스트리핑 장비
Artikelnr.: MA1250D-118BB
Type of toolR&D /파일럿 생산 장비Line Voltage [V]480Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4N2Process gas 5-Process gas 6-Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65)