Muegge Products
Etching & Deposition
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-463BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-593BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-703BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-713BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-743BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-753BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-783BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-793BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)