Muegge Products

Plasma components

Plasma components
  • Plasma array (large area)

    Item number: MA4000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-083BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    3000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-093BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-103BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 338 mm x 408 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-123BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Single

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA4000Y-153BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA6000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 700 mm x 226 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

  • Plasma array (large area)

    Item number: MA6000Y-023BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 797,5 mm x 150 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.