Muegge Products

Plasma components

Plasma components
  • Atmospheric Plasma Source

    Item number: MA075KA-019BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power [W]
    75000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    outer ø131 mm. inner ø80 mm
  • Atmospheric Plasma Source

    Item number: MA6000A-013BB

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power [W]
    6000
    Frequency [MHz]
    2450
    Waveguide size
    WR340 / R26
    Reactor outlet
    ø30 mm x 1,5 mm x 200 mm

MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.