Muegge Products

208

208
  • Switch-Mode

    Item number: MX3000D-170KL

    Frequency [MHz]
    2450
    Output Power [W]
    3000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    208
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    3000
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH3000S-250BF, MH3000S-251BF, MH3000S-252BF
    Power-Supply
    Switch-Mode

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  • Switch-Mode

    Item number: MX3000D-173KL

    Frequency [MHz]
    2450
    Output Power [W]
    3000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    208
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH3000S-250BF, MH3000S-251BF, MH3000S-252BF
    Power-Supply
    Switch-Mode

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  • Switch-Mode

    Item number: MX2000D-170KL

    Frequency [MHz]
    2450
    Output Power [W]
    2000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    208
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    2000
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH2000S-250BF, MH2000S-251BF, MH2000S-252BF
    Power-Supply
    Switch-Mode

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  • Switch-Mode

    Item number: MX2000D-173KL

    Frequency [MHz]
    2450
    Output Power [W]
    2000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    208
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH2000S-250BF, MH2000S-251BF, MH2000S-252BF
    Power-Supply
    Switch-Mode

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  • Switch-Mode

    Item number: MX6000D-150KG

    Frequency [MHz]
    2450
    Output Power [W]
    6000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    208
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    6000
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    RS-232
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH6000S-250BF, MH6000S-251BF
    Power-Supply
    Switch-Mode

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  • Switch-Mode

    Item number: MX6000D-153KG

    Frequency [MHz]
    2450
    Output Power [W]
    6000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    208
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    RS-232
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH6000S-250BF, MH6000S-251BF
    Power-Supply
    Switch-Mode

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  • Switch-Mode

    Item number: MX6000D-153KL

    Frequency [MHz]
    2450
    Output Power [W]
    6000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    208
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water
    Pulse output power max [W]
    -
    Front-Panel (HMI)
    Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection
    IP20
    Isolator
    No
    Related Magnetron Head
    MH6000S-250BF, MH6000S-251BF
    Power-Supply
    Switch-Mode

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  • Stripping-Tool

    Item number: MA0000D-001BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)

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