Suggestions
from the experts

Many branches are discovering microwave and plasma technology as ways to accelerate and enhance processes as well as to increase efficiency. Being a global leader, our experts provide information right from the source of innovations. „MUEGGE Insights“ is your gateway to ideas that build the foundation of tomorrow's energy solutions.
Article
Semi-Conductor Microwave and Chamber-Clean
Chamber-Clean after Dielectrics Deposition – A case for isotropic microwave plasma As deposition is one of the pillars of semiconductor production, it depends on a …
Learn more
Article
Automotive / MEMS / Microwave-Technology / Semi-Conductor 3D-simulation: Slim down your component development process
While developing thermoprocessing equipment, testing of prototypes and numerous repetitions cost plenty oftime and resources. 3D simulation capabilities allow you to speed up your prototyping …
Learn more
Article
MEMS / Semi-Conductor Photoresist Removal after High Dose Implant (HDIS)
High Dose Implant Strip (HDIS) – Challengeable process in semiconductor manufacturing Photoresist strip after high dose implant strip remains one of the most demanding processes …
Learn more
Article
MEMS / Semi-Conductor Endpoint Control for Thick Photoresist Removal
Complete removal of thick photoresist needs proper endpoint detection Applying microwave (MW) plasma to remove thick resist such as used for micro-machinery and microelectromechanical systems …
Learn more
Article
MEMS / Semi-Conductor Quality leaps in Micromachinery and MEMS
Removal of thick and embedded photoresist – A case for isotropic microwave plasma Microwave plasma is the perfect solution for removing thick resist such as …
Learn more

Whitepaper

The progress is in the details. Learn all about the latest insights and new developments in microwave and plasma technology. Provided directly by our specialists and tailored to your process.

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

sales@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA

Tel.: +49 (0) 6164 – 9307 – 0

Fax: +49 (0) 6164 – 9307 – 93

sales@muegge.de

MUEGGE Group

Hochstrasse 4 – 6

64385 Reichelsheim

Germany

Tel.: +1-209-527-8960

Fax: +1-209-527-5385

sales@muegge-gerling.com

Gerling Applied Engineering, Inc.

P.O. Box 580816

Modesto, CA 95358-0816

USA