Muegge Products
ISO-K 63
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Radical plasma source (Remote Plasma Source)
Item number: MA1250C-003BC
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]1250Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-133BB
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-143BB
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-233BB
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-713BB
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-753BB
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-793BB
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-833BB
ProcessEtching & DepositionOutput Connection TypeISO-K 63Dielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [Mhz]2450Radikalquelle (Remote-Plasma-Quelle)
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